发明名称 METHOD FOR PRODUCING FILM-FORMING MATERIAL
摘要 <p>Disclosed is a method for producing a film-forming material wherein a metal compound (W) having two or more isocyanate groups is dissolved in a solvent (S). Specifically, the method for producing a film-forming material comprises a step for removing isocyanic acid in a solution (R1) which is obtained by dissolving the metal compound (W) in the solvent (S), and a step for filtering the solution (R1) in an inert gas atmosphere after the removal of isocyanic acid.</p>
申请公布号 WO2007091569(A1) 申请公布日期 2007.08.16
申请号 WO2007JP52051 申请日期 2007.02.06
申请人 TOKYO OHKA KOGYO CO., LTD.;RIKEN;MATSUMARU, SHOGO;DAZAI, TAKAHIRO;HADA, HIDEO;FUJIKAWA, SHIGENORI;KUNITAKE, TOYOKI 发明人 MATSUMARU, SHOGO;DAZAI, TAKAHIRO;HADA, HIDEO;FUJIKAWA, SHIGENORI;KUNITAKE, TOYOKI
分类号 C09D185/00;C09D183/00;G03F7/40;H01L21/312 主分类号 C09D185/00
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