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发明名称
摘要
申请公布号
JP3959364(B2)
申请公布日期
2007.08.15
申请号
JP20030098183
申请日期
2003.04.01
申请人
发明人
分类号
H01L21/60;H01L23/29;H01L23/31
主分类号
H01L21/60
代理机构
代理人
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地址
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