| 摘要 |
PROBLEM TO BE SOLVED: To provide a fixing member between a substrate holder and a placing stand, which is easily detachable. SOLUTION: A substrate processing apparatus comprises: a substrate holder for holding a substrate; a placing stand for placing the substrate holder; and a fixing means 150 for fixing the placing stand to the substrate holder. The fixing means comprises: through-holes 283, 273 provided in a top plate 281 of the placing stand and a bottom plate 271 of the substrate holder; a fixing pin 100 which is inserted through the through-hole, has a head 101 and is provided with a key 105 at a leg part; a key hole into which the key 105 penetrating the through-hole is inserted; and a pin stopping plate 120 provided with a key hole and a groove for fitting to the key crossing the key hole. The fixing pin 100 takes two engaging and disengaging states consisting of a locked state and an unlocked state by a relative rotation between the fixing pin 100 and the pin stopping plate 120. In the locked state, the key 105 is fitted into the groove, and the bottom plate 271 and the top plate 281 are pinched between the head 101 of the fixing pin 100 and the pin stopping plate 120. In the unlocked state, the key 105 is disengaged from the groove and can be pulled from the key hole. COPYRIGHT: (C)2007,JPO&INPIT |
