SYSTEM AND METHOD FOR PRODUCT YIELD PREDICTION

摘要

PROBLEM TO BE SOLVED: To achieve an improved method for product yield prediction of an integrated circuit product. SOLUTION: The method for generating the yield prediction of all or a part of an integrated circuit includes (a) a step of specifying an attribution which is the attribution in the product layout and can show systematic yield loss, using layout property from the product layout for the integrated circuit; (b) a step of generating the yield prediction using the attribution specified in the product layout as an input, and information about parameters defined with a yield model. The parameters of the yield model characterize failure in all or a part of the integrated circuit which may be produced by actual manufacturing processes. COPYRIGHT: (C)2007,JPO&INPIT