| 摘要 |
A plurality of floating gates are formed on a principal surface of a semiconductor substrate that constitutes a nonvolatile semiconductor memory device through a first gate dielectric film. An auxiliary gate formed on the principal surface of the semiconductor substrate through a third gate dielectric film is formed on one adjacent side of the floating gates. A groove is formed on the other adjacent side of the floating gate, and an n-type diffusion layer is formed on a bottom side of the groove. A data line of the nonvolatile semiconductor memory device is constituted by an inversion layer formed on the principal surface of the semiconductor substrate to be opposed to an auxiliary gate by applying desired voltage to the auxiliary gate, and the n-type diffusion layer.
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