| 摘要 |
PROBLEM TO BE SOLVED: To obtain the technology of smoothing a surface that has desired accuracy, in an embedding type waveguide layer formed by the growth of a single crystal and allowing integration. SOLUTION: The over-cladding layer 4 of at least one waveguide layer other than the uppermost layer has, in the following order: a lower embedding layer 4d covering a core 2a; an etching stop layer or etching monitor layer 10; and a partial upper embedding layer 4u excluding a raised portion 4a corresponding to the core 2a of the lower embedding layer 4d. The upper face of the raised portion 4a of the lower embedding layer 4d and the upper face of the partial upper embedding layer 4u form a planarized face. COPYRIGHT: (C)2007,JPO&INPIT |
