发明名称 |
INTEGRIERTE ELEKTRONISCHE HARDWARE FÜR WAFERBEHANDLUNGS-STEUERUNG UND -DIAGNOSE |
摘要 |
A central controller for use in a semiconductor manufacturing equipment integrates a plurality of controllers with an open architecture allowing real-time communication between the various control loops. The central controller includes at least one central processing unit (CPU) executing high level input output (i/o) and control algorithms and at least one integrated i/o controller providing integrated interface to sensors and control hardware. The integrated i/o controller performs basic i/o and low level control functions and communicates with the CPU through a bus to perform or enable controls of various subsystems of the semiconductor manufacturing equipment. |
申请公布号 |
DE60127257(T2) |
申请公布日期 |
2007.07.05 |
申请号 |
DE2001627257T |
申请日期 |
2001.06.29 |
申请人 |
LAM RESEARCH CORP. |
发明人 |
NGO, TUAN;KAVEH, FARRO;LAM, CONNIE;HUANG, CHUNG-HO;NI, TUQIANG;LE, ANTHONY T.;SALKOW, STEVEN |
分类号 |
G05B19/414;H01L21/3065;G05B19/042;H01J37/00;H01J37/32;H01L21/00;H01L21/02 |
主分类号 |
G05B19/414 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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