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发明名称
Verfahren und Vorrichtung zum Aufbringen von duennen Schichten
摘要
申请公布号
DE1765850(A1)
申请公布日期
1971.10.28
申请号
DE19681765850
申请日期
1968.07.26
申请人
EUROPAEISCHE ATOMGEMEINSCHAFT
发明人
WURM,JOSEPH;BEUCHERIE,PIERRE;BLOCK,MICHEL
分类号
C23C14/34;C23C14/32;C23C14/40;H01J37/34;H01L21/302;H01L21/3065
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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