A PRINTED CIRCUIT BOARD TYPE ANTENNA FOR INDUCTIVELY COUPLED PLASMA GENERATING DEVICE

摘要

An antenna for an inductively coupled type plasma generation device having a PCB(Printed Circuit Board) is provided to simplify manufacture of the antenna having a complicated shape for improving the uniformity of a plasma by patterning an antenna circuit on a substrate. An antenna for an inductively coupled type plasma generation device includes a PCB(10), and a connection unit(30). Antenna patterns are etched and formed on the PCB(10). The connection unit(30) has a core unit(32), and a supporting unit(34). The core unit(32) supports to stack the PCB(10) in parallel, and has a metallic material on a center thereof to electrically connect the antenna patterns formed on the PCB(10). The connection unit(30) has a supporting unit which is formed as an insulator on an outer side of the core unit(32). The antenna patterns are formed on both upper/lower planes of the PCB(10). The PCB(10) has a hollow shape or donut shape of a rectangular shape by removing the other area except an antenna pattern forming area.