发明名称 VAPOR RANDOMIZATION IN VACUUM DEPOSITION OF COATINGS
摘要 In the processes for forming protective coatings on metal substrates, particularly the nickel-base and cobalt-base superalloys, by deposition in a vacuum, an electrically biased substrate, in conjunction with a sustained plasma discharge between the source and the substrate, is utilized to randomize the coating vapor cloud and allow non-line-of-sight deposition.
申请公布号 US3639151(A) 申请公布日期 1972.02.01
申请号 USD3639151 申请日期 1969.03.13
申请人 UNITED AIRCRAFT CORP. 发明人 RICHARD C. KRUTENAT
分类号 C23C14/32;H01J37/36;(IPC1-7):C23C11/02 主分类号 C23C14/32
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