| 摘要 |
PROBLEM TO BE SOLVED: To observe and confirm an observation region on an object by displaying it as an image on an observation display part before scanning the region with a scanning optical system. SOLUTION: An optical system 1 in which the surface of the object is scanned with a luminous flux from a laser light source 2 via a rotating mirror 5 with the rotation axis in the perpendicular direction is constituted so that it is once imaged on a primary imaging surface. An image optical system 16 having a vertical structure in which the luminous flux from the primary imaging surface is directed toward the object placed so that the surface is in the horizontal direction is constituted and installed between the primary imaging surface and the object. The surface of the object is illuminated by a separately installed illumination optical system from the upper part of the image optical system 16, and the reflection light from the illumination area is sent from the image optical system to the observation display part 19 so as to be confirmed as the observation image. COPYRIGHT: (C)2007,JPO&INPIT
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