| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve the safety and efficiency of a mechanism for transporting a substrate to be processed into and from a process, and to give no influences such as a mechanical vibration and the like. <P>SOLUTION: Both transport mechanisms 120A, 120B reciprocate to a reciprocating position set near a stage 80 after completion of a resist applying treatment, and both transport bridges 126A, 126B slip out from under fixing transport routes 32A, 32B to the side of the stage 80, and hang over the stage 80 from both right and left sides so that leading edges thereof are abutted to each other at the central position of the stage 80 in a transport direction. At this reciprocating position, the fixing transport route 32A on the transport-in side is connected to the fixing transport route 32B on the transport-out side via both the transport bridges 126A, 126B, and a first flat flow transport route 32 is formed. <P>COPYRIGHT: (C)2007,JPO&INPIT |
