RF TEST METHOD FOR SEMICONDUCTOR DEVICE USING RF TEST APPARATUS

摘要

An RF(Radio Frequency) test method for a semiconductor device using an RF test apparatus is provided to improve quality of a product by periodically checking an S parameter so as to form an accurate test environment. According to an RF(Radio Frequency) test method for a semiconductor device using an RF test apparatus including an RF generator, it is checked whether the sequency of the semiconductor device starting a test is initialized as a-th sequence or a compensation value is initialized as "b"(50). If the sequence or the compensated value of the semiconductor device is initialized, the test of the semiconductor device is performed using the RF generator(51) and it is checked whether the semiconductor device is good or bad. If the semiconductor device is good, a reflection coefficient and a transmission coefficient are checked. The reflection coefficient enables to know generation of loss in an input port, and the transmission coefficient enables to know internal loss generated while passing through an output port of the RF generator. If the reflection coefficient and the transmission coefficient are normal, the compensation value is set as another value except "b", and the test is ended.