FLUID ACTUATOR, HEAT GENERATING DEVICE USING THE SAME, AND ANALYSIS DEVICE

摘要

A fluid actuator includes a piezoelectric body (31), a fluid channel (2) having the piezoelectric body (31) on a part of the inner wall and enabling a fluid to move inside, and an elastic surface wave generation unit (101) for driving the fluid in the fluid channel by an elastic surface wave generated from a comb-shaped electrode formed on the surface of the piezoelectric body (31) facing the fluid channel (2). The elastic surface wave generation unit (101) is arranged at the position offset from the center of the fluid channel (2). The fluid actuator can perform drive with a low voltage and drives the fluid in a narrow fluid channel in one direction.