发明名称 Layout method of power line for semiconductor integrated circuit and semiconductor integrated circuit manufactured by the layout method
摘要 Provided are a layout method of a power line for a semiconductor integrated circuit and a semiconductor integrated circuit manufactured by the layout method. The layout method includes the steps of: forming a decoupling capacitor on a substrate; laying out a first metal layer, connected to the decoupling capacitor through a contact, above a region where the decoupling capacitor is formed so as to cover the decoupling capacitor; and laying out a second metal layer above a region where the first metal layer is formed. Therefore, the metal layers and the decoupling capacitor are laid out in the same region so that a chip area can be prevented from being additionally consumed at the time of laying out the decoupling capacitor, and degradation which may occur due to connection line resistance from the power lines to the decoupling capacitors can be prevented.
申请公布号 US2007134852(A1) 申请公布日期 2007.06.14
申请号 US20060523212 申请日期 2006.09.19
申请人 BYUN SANG JIN;YU HYUN KYU 发明人 BYUN SANG JIN;YU HYUN KYU
分类号 H01L21/82 主分类号 H01L21/82
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