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发明名称
VERFAHREN ZUR HERSTELLUNG DÜNNER, SCHWER LÖSLICHER BESCHICHTUNGEN
摘要
申请公布号
DE50210087(D1)
申请公布日期
2007.06.14
申请号
DE20025010087
申请日期
2002.11.29
申请人
HAHN-MEITNER-INSTITUT BERLIN GMBH
发明人
MUFFLER, HANS-JUERGEN;BAER, MARCUS;MUELLER, FELIX;FISCHER, CHRISTIAN-HERBERT;LUX-STEINER, MARTHA CHRISTINA
分类号
C23C20/06;C23C8/02;C23C24/08;C23C26/00;H01L31/18
主分类号
C23C20/06
代理机构
代理人
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地址
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