发明名称 TEACHING DEVICE AND TEACHING METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a teaching device which precisely arranges a holder at a target position without requiring a time and labor in manufacturing, and to provide a teaching method. <P>SOLUTION: The teaching device 5 comprises a first member 51 held by the holder 11 of a conveying device 1, a second member 52 which is attached to a placement base 2 and opposes the first member 51 held by the holder 11 when the holder 11 comes close to a part near the target position, an output part 55, an operational part 540, a first storage 534, and a first detecting means 533. The first member 51 includes a distance sensor 512 for generating a sensor signal which indicates a distance from the opposing surface of the second member 52 to the first member 51. A reference mark A is formed on the opposing surface of the second member 52 to the first member 51. The first member 51 comprises an imaging means 513 for picking up an image including the reference mark A and generating image data. <P>COPYRIGHT: (C)2007,JPO&INPIT</p>
申请公布号 JP2007142269(A) 申请公布日期 2007.06.07
申请号 JP20050336054 申请日期 2005.11.21
申请人 NEC ELECTRONICS CORP 发明人 TOYAMA TOSHIHIRO;SAMANO HAJIME
分类号 H01L21/68;B25J9/22 主分类号 H01L21/68
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