TECHNIQUE FOR SEPARATING A MOLD FROM SOLIDIFIED IMPRINTING MATERIAL

摘要

The present invention provides a method for separating a mold (136) from solidified imprinting material that includes creating deformation in the template (214) in which the mold is included. The deformation (P2) is sufficient to create a returning force that is greater than the adhesion force between the solidified imprinting material and the mold. For example, the deformation may result from a pressure differential created by a pump system (546) between the mold and a side of the template disposed opposite to the mold. In this manner, the distortion may be undulations in the template of sufficient magnitude to contact a substrate upon which the solidified imprinting material is disposed.