| 摘要 |
A regulated low power control system for electrostatic actuators is provided to optimize power consumption of the system by applying the voltage and/or the duration suitable for controlling a mobile drive unit. Voltage increasing units(L,D,Q1;L,D,Q1,Q2) are connected to terminals of a low voltage powering unit(UDD) and delivers a high voltage at an output thereof. Measuring units(Ca,Cb,Cref) measure a value of variable electric quantity powered by the low voltage powering unit when a high voltage is generated. A regulating unit(REG) for the voltage increasing unit is arranged to increase the high voltage delivered for a variation in the measured values of the variable electric quantity lower than a variation threshold determined by a servomechanism, and to decrease the high voltage delivered for a variation in the measured values of the variable electric quantity higher than the determined variation threshold.
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