Micro electro mechanical system type structure e.g. micro-accelerometer, dampening device, has permanent magnet creating magnetic field whose component is normal to plane of mobile or deformable plate and varied in displacement direction

摘要

The device has a permanent magnet disposed over a mobile or deformable plate (2) and machined for creating a magnetic field. The created magnetic field has a component normal to the plane of the mobile or deformable plate and varied in the displacement direction. The plane presents a dimension (l-x) which is an integer multiple of a semi-period of the component of the magnetic field. An independent claim is also included for a device for measuring the speed of a micro electro mechanical system type structure.