METHOD FOR MAKING AN EMISSIVE CATHODE

摘要

The invention concerns a method for producing a triode-type cathode structure including steps for depositing and steps for etching a cathode layer to transform it to cathode conductors; a grid layer to transform it into grid conductors; an electrically insulating layer and the grid conductors until a resistive layer is achieved to provide cavities; cathode conductors to provide them with an open-work structure at the intersection of the cathode conductors and the grid conductors. The invention is characterized in that the steps for etching the grid conductors and the electrically insulating layer consist in: a) depositing a resin layer on the grid layer; b) patterning the resin layer by means of lithography to obtain emissive pads; c) etching the structured grid layer into grid conductors, based on the pattern; d) etching the insulating layer underlying the grid layer by enlarging the etching beyond the emissive pads; e) etching the grid layer at the zones exposed by etching the insulating layer until the resin layer is reached; f) depositing a catalyst layer into the openings of the resin layer so as to form the emissive pads at the base of the cavity; g) removing the resin layer.