DEVICE AND METHOD FOR FORMING ONE OR MORE SPACED CUT GROOVES IN SURFACE OF SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a device capable of irradiating a substrate with a plurality of homogeneous laser beams to form one or more spaced cut grooves on a surface of the substrate.

SOLUTION: In the device for forming one or more spaced cut grooves on the surface of the substrate, a laser beam 4 emitted by a laser 3 irradiates a diffraction grating element 6 to branch off into two first cutting beams 7, and the first cutting beams 7 irradiate a diffraction grating element 10 to branch off into second beams 12, respectively. The second beams 12 irradiate an optical element 14 to become parallel, and irradiate the surface of the substrate 15 vertically.

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