| 发明名称 |
METHOD FOR PRODUCTION OF NANO-POROUS SUBSTRATE |
| 摘要 |
<p>Disclosed is a nano-porous substrate. The nano-porous substrate can be produced by: coating a amphiphilic block copolymer on a substrate to form a substrate having a nano-phase-separated structure thereon, wherein the nano-phase-separated structure has hydrophilic cylinders in the direction perpendicular to the surface of the film; and immersing the substrate into an etching solution to form a nano-porous substrate having pores with a diameter of 3-40 nm, wherein the pores are spaced 60 nm or shorter apart.</p> |
| 申请公布号 |
WO2007055371(A1) |
申请公布日期 |
2007.05.18 |
| 申请号 |
WO2006JP322616 |
申请日期 |
2006.11.14 |
| 申请人 |
TOKYO INSTITUTE OF TECHNOLOGY;IYODA, TOMOKAZU;KAMATA, KAORI;WATANABE, RYOKO |
发明人 |
IYODA, TOMOKAZU;KAMATA, KAORI;WATANABE, RYOKO |
| 分类号 |
H01L21/306;B82B3/00;C08J9/00;C23F1/00 |
主分类号 |
H01L21/306 |
| 代理机构 |
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