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发明名称
SEMICONDUCTOR MANUFACTURING APPARATUS FOR USE OF HOT PROCESS
摘要
申请公布号
KR100719519(B1)
申请公布日期
2007.05.11
申请号
KR20050112729
申请日期
2005.11.24
申请人
NEWYOUNGTECH. CO., LTD.
发明人
LEE, KWANG JUN;SUNG, NO YOUNG;KIM, YONG RYEYOO
分类号
H01L21/02
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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