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发明名称
THE RAPID THERMAL PROCESS APPARATUS WITH INTERLOCK FUNCTION
摘要
申请公布号
KR20070047537(A)
申请公布日期
2007.05.07
申请号
KR20050104386
申请日期
2005.11.02
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
PARK, MYUNG JAE
分类号
H01L21/324
主分类号
H01L21/324
代理机构
代理人
主权项
地址
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