IMPROVED APPARATUS AND METHOD FOR GROWTH OF A THIM FILM,申请号KR20027002315-传众专利搜索

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发明名称	IMPROVED APPARATUS AND METHOD FOR GROWTH OF A THIM FILM
摘要
申请公布号	KR100853702(B1)	申请公布日期	2008.08.25
申请号	KR20027002315	申请日期	2002.02.22
申请人		发明人
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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