发明名称 Metal coatings
摘要 A method of forming a metal coating comprising the steps of: (a) generating an arc at a metal target to create metal ions in a chamber that is under vacuum or has an inert atmosphere; (b) depositing the metal ions on a substrate to form a metal layer thereon; and (c) controlling an amount of gas in the chamber to form a primary metal-gas compound layer on said metal layer and a secondary metal-gas compound layer on said primary metal-gas compound layer, wherein said primary and secondary metal-gas compound layers have different gas atom contents.
申请公布号 US2007092740(A1) 申请公布日期 2007.04.26
申请号 US20060500608 申请日期 2006.08.08
申请人 NANOFILM TECHNOLOGIES INTERNATIONAL PTE LTD. 发明人 SHI XU;CHEAH LI K.
分类号 C23C16/00;B32B15/04;H05H1/24 主分类号 C23C16/00
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