| 发明名称 |
LANTHANUM ALUMINUM OXYNITRIDE DIELECTRIC FILMS |
| 摘要 |
Electronic apparatus and methods of forming the electronic apparatus include a lanthanum aluminum oxynitride film on a substrate for use in a variety of electronic systems. The lanthanum aluminum oxynitride film may be structured as one or more monolayers.
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| 申请公布号 |
US2007090440(A1) |
申请公布日期 |
2007.04.26 |
| 申请号 |
US20060566038 |
申请日期 |
2006.12.01 |
| 申请人 |
MICRON TECHNOLOGY, INC. |
发明人 |
AHN KIE Y.;FORBES LEONARD |
| 分类号 |
H01L29/94;H01L27/108;H01L29/76;H01L31/119 |
主分类号 |
H01L29/94 |
| 代理机构 |
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