| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical element having a characteristic more approximate to the optical characteristic expected from the design by improving a manufacturing method of the optical element using a DLC (Diamond Like Carbon) film. SOLUTION: The optical element contains the light-transmissive DLC film 2 formed on a light-transmissive substrate 1, wherein the DLC film has a thickness in the range of 0.7 to 3μm, a refractive index of at least a part of region of the DLC film is enhanced by irradiation of an energy beam 4 which penetrates the thickness of the region and, as the result, the refractive index of 1.7 or more is materialized either on a beam incident side surface of the DLC film 2 or on a substrate side surface in the region irradiated with energy beams. COPYRIGHT: (C)2007,JPO&INPIT |
