| 摘要 |
PROBLEM TO BE SOLVED: To detect a true synchronous component of rotation and an asynchronous component of rotation. SOLUTION: A rotary deflection amount detecting means comprises: a first detecting means for detecting a radial displacement of a turntable 112 by a rotary deflection detecting sensor 115 located without contact with the turntable 112; a second detecting means for detecting a rotary angle of a table turning means; a reference value storage means (storage area 205a) for storing data of the rotary angle of the table turning means and the displacement while the turntable 112 is at a predetermined rotational speed or lower, obtained about one revolution of the turntable at predetermined angles; a present value storage means (storage area 205b) for storing data of the rotary angle of the table turning means and the displacement while the turntable 112 is at a speed higher than the predetermined rotational speed, obtained about one revolution of the turntable at predetermined angles; and a micro-controller 204 for performing subtraction between these two data. COPYRIGHT: (C)2007,JPO&INPIT
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