| 摘要 |
PROBLEM TO BE SOLVED: To provide a prober wherein a defect (contact mark) due to contact with the electrode pad of a probe is limited within the electrode pad. SOLUTION: The prober includes a probe guard 25 with a probe to touch an electrode, a wafer stage 18, movement mechanisms 12-17 of the wafer stage, and a movement control unit 27 to control the movement mechanism. The control unit controls the movement mechanisms in a manner that, when the electrode of a semiconductor device is brought into contact with a probe 26, the electrode thereof may be moved just beneath the probe 26, and the wafer stage 18 may be moved to the movement completion position toward the probe in a first direction so as to bring the electrode into contact with the probe 26. The control unit can control the movement mechanism so that the wafer stage may be moved at an optional speed in the first direction. COPYRIGHT: (C)2007,JPO&INPIT |
