| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical foreign matter detector capable of detecting the abnormal state of a planar substrate with proper sensitivity, and to provide a treatment liquid coating device loaded therewith. SOLUTION: The substrate 1 to be treated placed on a stage 2 in a horizontal state and a treatment liquid supply nozzle 11, having a slit-like discharge opening 11b extending in the width direction of the substrate 1 are relatively moved, and the treatment liquid discharged in a strip-like state from the treatment liquid supply nozzle 11 is applied to the surface of the substrate 1. A light-transmitting type sensor unit, which is composed of a floodlight projection part 5 and a light detection part 6 is mounted on the substrate 1, in front of the moving direction of the treatment liquid supply nozzle 11 relatively moved with respect to the substrate 1. The sensor unit is equipped with a first detection means for detecting whether the light detection output of the laser beam in the light detection part 6 is a predetermined value or larger, and a second detection means for detecting whether the change quantity of the light detection output per a unit time is a predetermined value or larger, and the presence of foreign matter is detected, on the basis of the logical addition of the detection outputs of the first and second detection means. COPYRIGHT: (C)2007,JPO&INPIT
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