摘要 |
A vibration gyro having a high accuracy, no vibration leak, and high S/N. The width of a detection leg of a resonator used in the vibration gyro is less than 3/5 of the width of drive legs. The length of the detection leg is larger than the length of the drive legs. As a result, the distance between the detection electrodes is decreased by comparison with the conventional vibration gyro and, therefore, the detection signal is increased and S/N is raised. Furthermore, increasing the leg length brings the natural vibration frequency of out-of-plane vibration of the drive legs close to the natural vibration frequency of the detection leg, providing good coupling and reducing vibration leak to the support section. As a result, Q is increased and S/N is accordingly further increased.
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