MICRO/NANO-MECHANICAL ACTUATORS WITH THE SPRING ROBUST AGAINST FABRICATION ERROR AND MATERIAL INSTABILITY,申请号KR20040085569-传众专利搜索

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发明名称	MICRO/NANO-MECHANICAL ACTUATORS WITH THE SPRING ROBUST AGAINST FABRICATION ERROR AND MATERIAL INSTABILITY
摘要
申请公布号	KR100698830(B1)	申请公布日期	2007.03.23
申请号	KR20040085569	申请日期	2004.10.26
申请人		发明人
分类号	B81B3/00	主分类号	B81B3/00
代理机构		代理人
主权项
地址

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