| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitance type pressure sensor which prevents any leakage from occurring in an airtight cavity and also prevents any sensing body and substrate from being broken. SOLUTION: The capacitance type pressure sensor comprises: the substrate 32 made of a dielectric material; the sensing body 41 which is fixed so as to be stacked on the substrate and whose thickness is made thin so as to deform in response to a pressure applied thereto; a fist electrode 44 having a radial electrode finger 44 which is formed on any one plane of opposite planes defined by the substrate and the deforming plane 49 of the sensing body being opposite to each other; and a second electrode 36 which is formed on the other plane and positioned at a prescribed spacing from the first electrode 44 so as not to overlap each other. COPYRIGHT: (C)2007,JPO&INPIT
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