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发明名称
晶圆保持体及具有该晶圆保持体之晶圆探针
摘要
本发明系关于一种晶圆保持体及具有该晶圆保持体之晶圆探针,其系用来检查半导体晶圆之晶圆探针所使用的晶圆保持体,其包含夹头和支持夹头之支持体,支持体具有和夹头相向之底部,在夹头和支持体底部之间形成空隙部,在空隙部具有用来冷却夹头和支持体中至少一方之冷却机构之至少一部分。
申请公布号
TW200711023
申请公布日期
2007.03.16
申请号
TW095125668
申请日期
2006.07.13
申请人
住友电气工业股份有限公司
发明人
板仓克裕;夏原益宏;仲田博彦
分类号
H01L21/67(2006.01);H01L21/66(2006.01);G01R1/067(2006.01)
主分类号
H01L21/67(2006.01)
代理机构
代理人
陈长文
主权项
地址
日本
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