| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate parting method ensuring the acquisition of smooth and high-quality parted surfaces. SOLUTION: Before parting a substrate 1 to be parted, crack proceeding direction constraining means 4 each of which constrains the proceeding direction of a crack C are formed at least at both ends of the scribe line SL forming part of the substrate 1 so that the crack C proceeding from the scribe line SL proceeds in the thickness direction of the substrate 1 during the parting of the substrate by a pressing member. COPYRIGHT: (C)2007,JPO&INPIT
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