发明名称 Trench semiconductor device has electrically isolated field electrode units in trench with different strength electrical coupling between adjacent pairs
摘要 <p>Trench semiconductor device comprises at least one trench (30) with an electrode arrangement (50) and many electrically isolated field electrode units (FP1-FP4). Pairs of units (FPj,FPj+1) are adjacent with a common border and have differently strong pair-wise electrical coupling between them. Different field electrode units with differently strong electrical coupling to the semiconductor material (20) are formed outside the trench. An independent claim is also included for a further trench semiconductor device.</p>
申请公布号 DE102005041321(A1) 申请公布日期 2007.03.15
申请号 DE20051041321 申请日期 2005.08.31
申请人 INFINEON TECHNOLOGIES AG 发明人 HIRLER, FRANZ
分类号 H01L29/06;H01L21/762;H01L29/78 主分类号 H01L29/06
代理机构 代理人
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