发明名称 TRANSPARENT CONDUCTIVE FILM, SINTERED BODY TARGET FOR TRANSPARENT CONDUCTIVE FILM FABRICATION, AND TRANSPARENT CONDUCTIVE BASE MATERIAL AND DISPLAY DEVICE USING THE SAME
摘要 A transparent conductive film which is amorphous, has a high transmittance of light in the visible region of short wavelengths, and is hard to beak with respect to bending is provided. The transparent conductive film is an amorphous oxide film composed of Ga, In, and O, in which a Ga content ranges from 35 at. % to 45 at. % with respect to all metallic atoms, a resistivity ranges 1.2×10−3Ω·cm to 8.0×10−3Ω·cm a film thickness is 500 nm or less, and a transmittance of light at a wavelength of 380 nm is 45% or more.
申请公布号 KR20070023720(A) 申请公布日期 2007.02.28
申请号 KR20067025724 申请日期 2005.06.06
申请人 发明人
分类号 C23C14/06;H01B5/14;C23C14/08;C23C14/34;G09F9/30 主分类号 C23C14/06
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