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发明名称
Projektionsbelichtungsanlage
摘要
申请公布号
DE10046218(B4)
申请公布日期
2007.02.22
申请号
DE20001046218
申请日期
2000.09.19
申请人
CARL ZEISS SMT AG
发明人
DRODOFSKY, ULRICH;MIESNER, HANS-JOACHIM;DIECKMANN, NILS;ANTONI, MARTIN
分类号
G01M11/02;G03F7/20;G02B3/08;G02B7/00;G02B19/00;G03B27/32;G03B27/54;H01L21/027
主分类号
G01M11/02
代理机构
代理人
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