| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method for a pattern forming body with which a characteristic change pattern can be formed to an objective pattern shape with high accuracy even when the pattern forming bodies are continuously manufactured. <P>SOLUTION: A base material, a photocatalyst-containing layer formed on the base material and a substrate for pattern formation whose surface characteristic is changed by the action of the photocatalyst associated with energy irradiation are arranged to face each other. The characteristic change pattern whose characteristic is changed by irradiating the photocatalyst-containing layer with energy is formed on a surface of the substrate for pattern formation. In the manufacturing method for the pattern forming body, a plurality of the pattern forming bodies are manufactured by repeating a pattern forming step for plural times. The manufacturing method for the pattern forming body is characterized by having an energy irradiation step for removing an adherent material adhered to the photocatalyst-containing layer by irradiating the photocatalyst-containing layer with energy by the same light source as that used in the pattern forming step between a plurality of pattern forming steps in a state where a photocatalyst-containing layer side substrate and the substrate for pattern formation are not faced to each other. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
