| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for treating contaminants and a method for treating contaminants, in which the clean side is hardly contaminated. SOLUTION: The apparatus for treating contaminants 1 is provided with a carriage 4 carrying an object to be treated a heating part A having heating chambers 21, 22 heating the object loaded on the carriage, and an after-treatment part B applying after-treatment to the object after heating and is divided and isolated into a dirty side and a clean side. The heating part A and the after-treatment part B are isolated to arrange at the dirty side and clean side respectively. The apparatus is characterized in that the object after heating is separated from the carriage 4 and carried to the after-treatment part B in order to prevent an incompletely heated material adhered to the carriage 4 out of the object from invading the clean side and the separated carriage 4 stays at the dirty side. COPYRIGHT: (C)2007,JPO&INPIT |
