发明名称 |
Testing method detecting localized failure on a semiconductor wafer |
摘要 |
A method and system for testing a wafer comprising semiconductor chips are disclosed. A determination of whether or not the wafer is defective is made in relation to a spatially related group of filtered failed semiconductor chips on the wafer, where the spatially related group corresponds to a localized failure on the wafer and is used to calculate a defect index value.
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申请公布号 |
US2007035322(A1) |
申请公布日期 |
2007.02.15 |
申请号 |
US20060373339 |
申请日期 |
2006.03.13 |
申请人 |
KANG JOONG-WUK;CHEONG KWANG-YUNG |
发明人 |
KANG JOONG-WUK;CHEONG KWANG-YUNG |
分类号 |
G01R31/26 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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