LITHOGRAPHIC DEVICE, IRRADIATION SYSTEM, IRRADIATION CONTROLLER, AND CONTROL METHOD

摘要

PROBLEM TO BE SOLVED: To lower a standard deviation of a pulsed output of an irradiation laser and enable provision of uniform pulsed irradiation onto each pulse window on a substrate.

SOLUTION: A negative-feedback control loop is implemented in such a configuration that a double integrator unit 309 at least twice integrates an irradiation dose signal representative of a measured pulsed-irradiation dose to generate an integrator output signal 313, which adjusts a driving input 315 to a source of irradiation laser pulses.

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