| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a pattern forming method by which, when an ITO film is formed on the pattern, a ITO film with low resistance can be formed while keeping small changes in the resistance within the plane, and to provide a substrate with a color filter having pixels formed by the above pattern forming method, and to provide a display element having the substrate with a color filter. <P>SOLUTION: The pattern forming method for obtaining a pattern of a color filter through at least a resin layer forming step of forming a photosensitive resin layer comprising a photopolymerizable photosensitive resin composition on a substrate, a pattern exposure step of exposing the layer using a laser, a developing step of developing the photosensitive resin layer after pattern exposure, and a post-baking step of heat treating the photosensitive resin layer after development. The color filter of the substrate with a color filter is formed by the above forming method. The display element is equipped with the substrate with a color filter. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
