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发明名称
离子布値方法
摘要
本发明揭示一种离子布值方法,其包括形成一对从一基板向外突出之具间隔且邻近的特征。该对具间隔特征之至少最外部份系藉一接收于该等特征上之图案化光阻层而相对彼此进行横向拉离,且该图案化光阻层于具有一其中接收于该对具间隔特征中间之开口。当此等具间隔特征横向拖拉,一物种便予以离子布值至基板材料中,其系低于该对具间隔特征地接收该基板材料。在该离子布值之后,该图案化光阻层系从该基板予以移除。本发明亦涵盖其它观点与具体实施例。
申请公布号
TW200703477
申请公布日期
2007.01.16
申请号
TW095120643
申请日期
2006.06.09
申请人
麦克隆科技公司
发明人
蓝道 考佛;特兰斯B 麦丹尼;王虹美;詹姆斯L 戴尔;李察H 连恩;弗莱德D 费许柏恩
分类号
H01L21/265(2006.01)
主分类号
H01L21/265(2006.01)
代理机构
代理人
陈长文
主权项
地址
美国
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