| 摘要 |
<p>A reticle for measuring polarization is provided to measure directly the amount of polarization supplied from exposure equipment by checking energy when a sensitive emulsion is removed in an exposure process using a predetermined pattern. A reticle for measuring polarization includes scribe lane. Line/space polarization patterns(100,110) are formed on the scribe lane. The line/space polarization patterns are formed in horizontal and vertical directions. A predetermined pattern with a predetermined angle range of 1 to 90 degree is formed between the horizontally and vertically arranged patterns.</p> |
