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发明名称
RUTILE DIELECTRIC MATERIAL FOR SEMICONDUCTOR DEVICES
摘要
申请公布号
KR100665429(B1)
申请公布日期
2007.01.04
申请号
KR19990050784
申请日期
1999.11.16
申请人
发明人
分类号
H01L27/10;H01L27/108;H01L21/334;H01L21/8242
主分类号
H01L27/10
代理机构
代理人
主权项
地址
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