APPARATUS CONNECTING GAS LINE USED IN A SEMICONDUCTOR EQUIPMENT

摘要

A gas line connecting apparatus for use in semiconductor equipment is provided to allow a tool to easily come into contact with polygonal surfaces formed on outer surfaces of a double female nut. A first gland(110) is connected to a first gas line, and a second gland(120) is connected to a second gas line. A double female nut(130) has a first female nut(130a) and a second female nut(130b) which are integrally formed on a center shaft. The first female nut and the second female nut have a polygonal outer surface, respectively. A first opening is formed along the center shaft for receiving the first gland. A male nut(140) has a second opening receiving the second gland, and is engaged with the double female nut.