| 摘要 |
Provided is a potential measuring device for measuring a potential of a measurement object, comprising a detection electrode disposed to face the measurement object, a reference electrode disposed in a vicinity of the detection electrode, an electrostatic shield structure for electrostatically shielding the reference electrode with respect to the measurement object, and capacitance modulator for modulating an electrostatic coupled capacitance between the detection electrode and the measurement object to measure a potential of the measurement object by using an electric signal generated on the detection electrode and an electric signal generated on the reference electrode.
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